Wafer handler interior Sizes: 150 × 150 / 500 × 292 / 768 × 448 / 900 × 525 / 1,000 × 200 / 435 × 254 / 569 × 569 / 348 × 220 / 250 × 250 / 300 × 159 / 200 × 110 / 300 × 107 / 1,000 × 583
